2009.06.16

222, Eigineering 2nd Bld, Hongo Campus

Prof. Richard Leach

   National Physical Laboratory, Teddington, UK

Title: Engineering measurement in micro-and nanotechnology

Abstract:

It is now fully appreciated that metrology will play an integral role in the successful development and commercialisation of micro- and nanotechnology. To this end the UK Government, through the National Measurement System, funded several groundbreaking projects in Programme for Engineering Measurement.

This review will briefly describe the background of the research, concentrating on the technical details of the projects. Projects include the development of traceable instrumentation to measure areal surface topography, very low forces and micro-scale geometry.

Schedule: 16:00 ~ 17:00  Tuesday  16th  June, 2009

Place: 222, Engineering 2nd Bld, Hongo Campus

Attached file: 20th open seminar.pdf