2009.06.16

工学部2号館2階222講義室

Prof. Richard Leach

   National Physical Laboratory, Teddington, UK

題目：Engineering measurement in micro-and nanotechnology

内容の概要説明：

It is now fully appreciated that metrology will play an integral role in the successful development and commercialisation of micro- and nanotechnology. To this end the UK Government, through the National Measurement System, funded several groundbreaking projects in Programme for Engineering Measurement.

This review will briefly describe the background of the research, concentrating on the technical details of the projects. Projects include the development of traceable instrumentation to measure areal surface topography, very low forces and micro-scale geometry.

日時：2009年6月16日(火）16:00 ~ 17:00

場所：東京大学工学部 2号館2階222会議室

添付ファイル： 第20回公開セミナー.pdf