2009.04.01

Engineering Bldg. 14, 1F, Lecture Room 142 (every Tuesday, 14:45 – 16:25)

Objective:
The objective of this course is to review each of the following precision-engineering-related topics from fundamentals through to applications: Processing Technology, Applied Optical Systems, Fabrication and Measurement in Optical Systems, and Fluidic Systems. We will also touch on the latest advancements in research related to miniaturization and refinement of mechanical systems, broadening the students’ knowledge of these engineering fields.

Lecture Overview:
“Fundamentals and applications of MEMS fabrication techniques”
(1) Materials science for MEMS
(2) MEMS mounting and packaging technology
(3) Expansion toward mass production of nano/micro systems

“Applied optics of nano/micro mechanical systems”
(1) Elemental technology of optical MEMS
(2) Optical micro-sensor applications
(3) Optical mounting and packaging

“Microfabrication and nanoscale measurement using localized optical energy”
(1) Optical energy properties and localization morphology
(2) Applications of nanoscale measurements using localized optical energy
(3) Applications of microfabrication using localized optical energy

“Microfluidic systems and their applications”
(1) Fundamentals of microfluidic systems
(2) Medical and bio-related applications of microfluidic systems
(3) Environmental applications of microfluidic systems

Evaluation will be based on attendance and submission of one or more reports.